Proceedings of the International Display Workshops Volume 31 (IDW '24)

Proceedings of the International Display Workshops Volume 31 (IDW '24)

Dec 4 - Dec 6, 2024Sapporo Convention Center
The International Display Workshops
Proceedings of the International Display Workshops Volume 31 (IDW '24)

Proceedings of the International Display Workshops Volume 31 (IDW '24)

Dec 4 - Dec 6, 2024Sapporo Convention Center

[FMCp2-10]Impact of Selective Substitutional Growth on Subthreshold Swing by PEALD Deposition Sequences

*SeongHun Yoon1, Seon Woong Bang1, Jae Kyeong Jeong1(1. Hanyang University (Korea))
https://doi.org/10.36463/idw.2024.0493

Keywords:

Oxide semiconductor,subthreshold swing,atomic layer deposition,conversion mechanism

In this study, the impact of various metal defects formed through selective substitutional growth by diethylzinc (DEZn) on the subthreshold swing (SS) in plasma-enhanced atomic layer deposition (PEALD)-derived indium-gallium-zinc oxide (IGZO) films was investigated. Among these defects, In-Zn defects were found to play a critical role in achieving a high SS value of 0.31 V/decade in IGZO thin-film transistors (TFTs).