[FMCp2] Manufacturing and Process

[FMCp2-10] Impact of Selective Substitutional Growth on Subthreshold Swing by PEALD Deposition Sequences

*SeongHun Yoon¹, Seon Woong Bang¹, Jae Kyeong Jeong¹ (1. Hanyang University (Korea))

Keywords:

Oxide semiconductor,subthreshold swing,atomic layer deposition,conversion mechanism

Password required to view

To view or download the proceedings, please log into your Confit account using the "Log in" button.

If you do not have a Confit account, enter the password provided by the IDW Secretariat in the designated box and click the "Authenticate" button.

orLog in