[FMCp2] Manufacturing and Process

[FMCp2-10] Impact of Selective Substitutional Growth on Subthreshold Swing by PEALD Deposition Sequences

*SeongHun Yoon¹, Seon Woong Bang¹, Jae Kyeong Jeong¹ (1. Hanyang University (Korea))

Keywords:

Oxide semiconductor,subthreshold swing,atomic layer deposition,conversion mechanism