Presentation Information
[FMCp2-10]Impact of Selective Substitutional Growth on Subthreshold Swing by PEALD Deposition Sequences
*SeongHun Yoon1, Seon Woong Bang1, Jae Kyeong Jeong1 (1. Hanyang University (Korea))
Keywords:
Oxide semiconductor,subthreshold swing,atomic layer deposition,conversion mechanism
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