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Effect of Combination Annealing with Water and Ethanol Vapors Added to NH<sub>3</sub> Gas on Reduction of Residual OH Bonds in Si Oxide Films

Manufacturing and Process

The 31st International Display Workshops (IDW '24)

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[FMCp2-12L]Effect of Combination Annealing with Water and Ethanol Vapors Added to NH₃ Gas on Reduction of Residual OH Bonds in Si Oxide Films

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Presentation Information

[FMCp2-12L]Effect of Combination Annealing with Water and Ethanol Vapors Added to NH3 Gas on Reduction of Residual OH Bonds in Si Oxide Films

Keywords:

[FMCp2-12L]Effect of Combination Annealing with Water and Ethanol Vapors Added to NH₃ Gas on Reduction of Residual OH Bonds in Si Oxide Films