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Study on the Thermal Simulation of Cooling Susceptor to Reduce Damage to Glass Substrate During Sputtering Process for OLED Display of the 8.5th generation

Manufacturing and Process

The 31st International Display Workshops (IDW '24)

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[FMCp2-13L]Study on the Thermal Simulation of Cooling Susceptor to Reduce Damage to Glass Substrate During Sputtering Process for OLED Display of the 8.5th generation

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