[FMCp2-13L] Study on the Thermal Simulation of Cooling Susceptor to Reduce Damage to Glass Substrate During Sputtering Process for OLED Display of the 8.5th generation | Proceedings of the International Display Workshops Volume 31 (IDW '24)

Proceedings of the International Display Workshops Volume 31 (IDW '24)

Dec 4 - Dec 6, 2024Sapporo Convention Center

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Proceedings of the International Display Workshops Volume 31 (IDW '24)

Dec 4 - Dec 6, 2024Sapporo Convention Center

[FMCp2-13L]Study on the Thermal Simulation of Cooling Susceptor to Reduce Damage to Glass Substrate During Sputtering Process for OLED Display of the 8.5th generation

*Hyun Min Cho¹, Yedalm Kim¹, Gang Yeol Yoo¹, Sangwon Shin², Yuhwa Choi²(1. Korea Electronics Technology Institute (Korea), 2. H&iruja Co., Ltd (Korea))

https://doi.org/10.36463/idw.2024.0503

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Keywords:

OLED,Susceptor,Sputtering,Thermal,Simulation

The size of glass substrates continues to increase to reduce the production cost of OLED displays. Accordingly, cooling of the susceptor for the sputtering system has also become very important. In this study, a thermal simulation was conducted to confirm the cooling effect by the cooling flow path, cooling fluid and additional cooling gas in the susceptor of the sputtering system for the 8.5th generation.

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