Presentation Information
[FMCp2-13L]Study on the Thermal Simulation of Cooling Susceptor to Reduce Damage to Glass Substrate During Sputtering Process for OLED Display of the 8.5th generation
*Hyun Min Cho1, Yedalm Kim1, Gang Yeol Yoo1, Sangwon Shin2, Yuhwa Choi2 (1. Korea Electronics Technology Institute (Korea), 2. H&iruja Co., Ltd (Korea))
Keywords:
OLED,Susceptor,Sputtering,Thermal,Simulation