Presentation Information
[FMCp2-14L]Influence of Wet and Dry Etching on IGZO TFTs Focusing on Sidewall Conductance and Hump Phenomenon
*Minsik Kong1, Soo-Yeon Lee1 (1. Seoul National University (Korea))
Keywords:
Thin Film Transistor,Dry Etching,Abnormal hump
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