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Influence of Wet and Dry Etching on IGZO TFTs Focusing on Sidewall Conductance and Hump Phenomenon

Manufacturing and Process

The 31st International Display Workshops (IDW '24)

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[FMCp2-14L]Influence of Wet and Dry Etching on IGZO TFTs Focusing on Sidewall Conductance and Hump Phenomenon

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