Presentation Information
[FMCp2-15L]Dependence of Recovery Characteristics of a-IGZO TFTs on Annealing Temperature
*Seungjun Choi1, Byung Seong Bae1, Seung Jae Moon2 (1. Hoseo university (Korea), 2. Ulsan National Institute of Science and Technology (Korea))
Keywords:
a-IGZO TFT,annealing,recovery