[INP2-1(Invited)]Fingertip Tactile Sensation Using Piezoelectric Micromachined Ultrasonic Transducers and Flexible Polymer Actuator
*Junji Sone1(1. Tokyo Polytechnic University (Japan))
Keywords:
tactile sensation,MEMS,ultrasonic wave,Aeroacoustics,electret-type flexible polymer actuator
To realize realistic metaverse communication, high-precision tactile feedback is required. Therefore, ultrasonic MEMS actuators were selected to transmit the vibration. Finger mounting pad is used and the ultrasonic waves can be amplified by the horn. Aeroacoustics effects are also used to complement the power of the ultrasonic wave. In addition, an electret-type flexible polymer actuator was developed. This device can also be used as a sensor.