[IST2-3L(Invited)]Sub-100 µm Precision Time-of-Flight Image Sensors and Their Applications
*Keita Yasutomi1, Shoji Kawahito1(1. Shizuoka University (Japan))
Keywords:
Time-of-Flight,3D imaging,indirect ToF,Lock-in Pixel
This paper presents a high-precision Time-of-Flight image sensor and system for 3D scanning application. The prototype sensor achieves sub-100 μm precision through impulse photocurrent response, lateral electric field modulation, and charge-injection reference plane sampling for jitter reduction.