[MEET1] Novel Materials, Fundamental Components and Process Technologies

1:40 PM - 2:00 PM JST(4:40 AM - 5:00 AM UTC)Invited

[MEET1-3(Invited)] Carbon Nanotube Based Cold Cathode Electron Beam (C-beam) for Semiconductor Manufacturing Process

*Kyu Chang Park¹, Iksu Kim¹, Umesh Balaso¹ (1. Kyung Hee University (Korea))

Keywords:

CNT(carbon nanotube),EUV(extreme ultraviolet),Electron beam,Hole drilling,microscopy