[MEET5] Micro/NanoDisplays and Nanotechnology Applications (4)

11:10 AM - 11:30 AM JST(2:10 AM - 2:30 AM UTC)Invited

[MEET5-2(Invited)] Metal Oxynitride Semiconductor Prepared by Reactive Sputtering of Metal Oxide Target for Thin Film Devices

Yuseong Jang¹, *Soo-Yeon Lee¹ (1. Seoul National University (Korea))

Keywords:

metal oxynitride,metal oxide,ferroelectric,HfZrOx

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