Proceedings of the International Display Workshops Volume 31 (IDW '24)
Dec 4 - Dec 6, 2024Sapporo Convention Center
Proceedings of the International Display Workshops Volume 31 (IDW '24)
Dec 4 - Dec 6, 2024Sapporo Convention Center
[MEET5-4(Invited)]5,000 PPI High-Density Vertical Stack R/G/B Micro-LED Pixel Architectures Fabricated by Unconventional Epitaxy
*Young Joon Hong1(1. Sungkyunkwan University (Korea))
Keywords:
micro LED,tandem pixel structure,remote epitaxy,exfoliation,photo-micro-lithography
We report remote and van der Waals epitaxy for fabricating high-density vertical R/G/B micro-LED pixel architectures. These non-covalent epitaxy techniques enable easy mechanical delamination and subsequent stacking of epi-layers, which are then precisely patterned using photolithography to form high-density pixel arrays. Our method offers a promising solution for precise LED alignment in ultra-high-resolution displays (e.g., AR and XR).