Presentation Information
[MEETp1-1]Analysis the Correlation between Electron Beam Performance and EUV Lighting
*Umesh Balaso Apugade1, Iksu Kim1, Kyu Chang Park1 (1. Kyung Hee University (Korea))
Keywords:
CNT(carbon nanotube),EUV(extreme ultraviolet),Electron beam,Electron emission,Efficiency