[MEETp1-1] Analysis the Correlation between Electron Beam Performance and EUV Lighting | Proceedings of the International Display Workshops Volume 31 (IDW '24)

Proceedings of the International Display Workshops Volume 31 (IDW '24)

Dec 4 - Dec 6, 2024Sapporo Convention Center

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Proceedings of the International Display Workshops Volume 31 (IDW '24)

Dec 4 - Dec 6, 2024Sapporo Convention Center

[MEETp1-1]Analysis the Correlation between Electron Beam Performance and EUV Lighting

*Umesh Balaso Apugade¹, Iksu Kim¹, Kyu Chang Park¹(1. Kyung Hee University (Korea))

https://doi.org/10.36463/idw.2024.1197

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Keywords:

CNT(carbon nanotube),EUV(extreme ultraviolet),Electron beam,Electron emission,Efficiency

We utilize vertically aligned carbon nanotube (CNT) based cold cathode electron beam (C-beam) as a field emitter to irradiate metallic anode target for the generation of EUV light. EUV lightning is influenced by C-beam irradiation condition. This study aims to analyze the correlation between electron beam performance and EUV lighting efficiency.

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