Presentation Information

[MEETp1-7]Effect of N2O Annealing on the Performance of Crystal IGTO TFTs

*Jiwon Sun1, Yuna Kim1, Seungchae Jung1, Taebin Lim1, Jin Jang1 (1. Kyung Hee University (Korea))

Keywords:

InGaSnO (IGTO),Post fabrication annealing (PFA),Thin-Film Transistors (TFTs)

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