Presentation Information

[MEETp1-7]Effect of N2O Annealing on the Performance of Crystal IGTO TFTs

*Jiwon Sun1, Yuna Kim1, Seungchae Jung1, Taebin Lim1, Jin Jang1 (1. Kyung Hee University (Korea))

Keywords:

InGaSnO (IGTO),Post fabrication annealing (PFA),Thin-Film Transistors (TFTs)