Presentation Information
[MEETp1-7]Effect of N2O Annealing on the Performance of Crystal IGTO TFTs
*Jiwon Sun1, Yuna Kim1, Seungchae Jung1, Taebin Lim1, Jin Jang1 (1. Kyung Hee University (Korea))
Keywords:
InGaSnO (IGTO),Post fabrication annealing (PFA),Thin-Film Transistors (TFTs)