[AMD1] Oxide TFT (1)

2:10 PM - 2:30 PM JST(5:10 AM - 5:30 AM UTC)

[AMD1-3] Advanced High-Mobility Multilayer TFTs Using Dynamic PVD Gas Separation System

*Yujiro Takeda¹, Wei-Chun Ma¹, You-Ron Lin¹, Elliot Lu¹, Dejiu Fan², Jung Bae Kim², Lynn Yang¹, Juergen Grillmayer¹, Zero Hung², Marcus Bender³, Soo Young Choi² (1. Applied Materials Taiwan (Taiwan), 2. Applied Materials, Inc. (United States of America), 3. Applied Materials GmbH & Co. KG (Germany))

Keywords:

high mobility,multilayer,IGZTO,dynamic PVD system,Gas separation

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