[AMD1-3] Advanced High-Mobility Multilayer TFTs Using Dynamic PVD Gas Separation System | The 32nd International Display Workshops (IDW '25)

The 32nd International Display Workshops (IDW '25)

Dec 2 - Dec 5, 2025International Convention Center Hiroshima

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The 32nd International Display Workshops (IDW '25)

Dec 2 - Dec 5, 2025International Convention Center Hiroshima

[AMD1-3]Advanced High-Mobility Multilayer TFTs Using Dynamic PVD Gas Separation System

*Yujiro Takeda¹, Wei-Chun Ma¹, You-Ron Lin¹, Elliot Lu¹, Dejiu Fan², Jung Bae Kim², Lynn Yang¹, Juergen Grillmayer¹, Zero Hung², Marcus Bender³, Soo Young Choi²(1. Applied Materials Taiwan (Taiwan), 2. Applied Materials, Inc. (United States of America), 3. Applied Materials GmbH & Co. KG (Germany))

https://doi.org/10.36463/idw.2025.0158

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Keywords:

high mobility,multilayer,IGZTO,dynamic PVD system,Gas separation

We investigated high-mobility multilayer TFTs using the dynamic PVD system. The gas separation unit allows comparable TFT performance without a significant increase footprint. The resulting TFTs demonstrate a high field-effect mobility of 26.2 cm²/V·s. In addition, process optimizations enabled the reduction of the channel length to 2 μm, and improved PBTS reliability, with ΔVth 0.8 V.

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