Presentation Information
[3]Advanced High-Mobility Multilayer TFTs Using Dynamic PVD Gas Separation System(20min.)
*Yujiro Takeda1, Wei-Chun Ma1, You-Ron Lin1, Elliot Lu1, Dejiu Fan2, Jung Bae Kim2, Lynn Yang1, Juergen Grillmayer1, Zero Hung2, Marcus Bender3, Soo Young Choi2 (1. Applied Materials Taiwan (Taiwan), 2. Applied Materials, Inc. (United States of America), 3. Applied Materials GmbH & Co. KG (Germany))
Keywords:
high mobility,multilayer,IGZTO,dynamic PVD system,Gas separation
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