[LCT5-2]Application of Liquid Crystal Films for Micro-LEDs Inspection
Shuo-Hsien Chen1, Yan-Rung Lin2, *Shie-Chang Jeng1(1. National Yang Ming Chiao Tung University (Taiwan), 2. Industrial Technology Research Institute (Taiwan))
Keywords:
Micro-LED,Liquid Crystal Films,Non-contact inspection
We demonstrate a method for inspecting micro-LEDs by placing a liquid crystal (LC) film over the micro-LED wafer. When illuminated, micro-LED dies can generate an open circuit voltage through the photovoltaic effect, which can be detected by observing changes in the transmittance of the LC film.
