The 74th JSAP Autumn Meeting,2013
Sep 16 - Sep 20, 2013Kyotanabe Campus, Doshisha University, Kyoto, Japan
The 74th JSAP Autumn Meeting,2013
Sep 16 - Sep 20, 2013Kyotanabe Campus, Doshisha University, Kyoto, Japan
[16a-A13-9]The drift reduction of Gallium Nitride layer SEM-EBSD mapping by Focused Ion Beam and carbon deposition
○Hirobumi Morita1, Takashi Egawa1, Hideki Hirota2, Kazutaka Nimura2(Nagoya Institute of Technology1, Hitachi High-Technologies2)
