The 74th JSAP Autumn Meeting,2013
Sep 16 - Sep 20, 2013Kyotanabe Campus, Doshisha University, Kyoto, Japan
The 74th JSAP Autumn Meeting,2013
Sep 16 - Sep 20, 2013Kyotanabe Campus, Doshisha University, Kyoto, Japan
[16a-A2-2]First-Principles Investigation on Chemical Mechanical Polishing Mechanism of α-Al2O3 Substrate by Silica Abrasive Grain
○Nobuki Ozawa1, Kang Zhou1, Takehiro Aizawa1, Yuji Higuchi1, Momoji Kubo1(Tohoku Univ.1)
