The 74th JSAP Autumn Meeting,2013
Sep 16 - Sep 20, 2013Kyotanabe Campus, Doshisha University, Kyoto, Japan
The 74th JSAP Autumn Meeting,2013
Sep 16 - Sep 20, 2013Kyotanabe Campus, Doshisha University, Kyoto, Japan
[16a-B3-1]Prediction of Argon Flow and Impurity Transport
in a CZ-Si Crystal Growth with Different Gas Flow Solvers
○Xin Liu1, Bing Gao1, Satoshi Nakano1, Koichi Kakimoto1(RIAM, Kyushu Univ.1)
