[27a-PA1-3]Raman spectroscopy analysis and obsevation of deep ultraviolet damaged ta-C film
○Tomomi Kozu1,2, Makoto Yamaguchi3,4, Masayuki Fujitsuka3, Shigeru Ueno3, Masahiro Kawaguchi5, Ken Nishida2, Hiromi Shima2, Takashi Yamamoto2, Yasunori Furukawa6(Renishaw1, NDA2, JSPMI3, TUAT4, TIRI5, Oxide6)
