The 60th JSAP Spring Meeting,2013

The 60th JSAP Spring Meeting,2013

Mar 27 - Mar 30, 2013Kanagawa Institute of Technology,Japan
JSAP Spring / Autumn Meeting
The 60th JSAP Spring Meeting,2013

The 60th JSAP Spring Meeting,2013

Mar 27 - Mar 30, 2013Kanagawa Institute of Technology,Japan

[27a-PA1-3]Raman spectroscopy analysis and obsevation of deep ultraviolet damaged ta-C film

Tomomi Kozu1,2, Makoto Yamaguchi3,4, Masayuki Fujitsuka3, Shigeru Ueno3, Masahiro Kawaguchi5, Ken Nishida2, Hiromi Shima2, Takashi Yamamoto2, Yasunori Furukawa6(Renishaw1, NDA2, JSPMI3, TUAT4, TIRI5, Oxide6)