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Presentation Information

Session Details

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Program Type

A study about the small defect and small particle detection on thin film by Glancing method of Multi-angular Images by the cross Correlation

Poster Session 9:30〜11:30(PA)<br><br>△：Young Scientist Oral Presentation Award Applied<br>▲：English Presentation<br>▼：Both Award Applied and English Presentation

JSAP Spring / Autumn Meeting

The 60th JSAP Spring Meeting,2013

The 60th JSAP Spring Meeting,2013

[27a-PA5-9]A study about the small defect and small particle detection on thin film by Glancing method of Multi-angular Images by the cross Correlation