The 60th JSAP Spring Meeting,2013

The 60th JSAP Spring Meeting,2013

Mar 27 - Mar 30, 2013Kanagawa Institute of Technology,Japan
JSAP Spring / Autumn Meeting
The 60th JSAP Spring Meeting,2013

The 60th JSAP Spring Meeting,2013

Mar 27 - Mar 30, 2013Kanagawa Institute of Technology,Japan

[27p-B6-7]Fabrication of thin-film spiral antennas for 220 GHz range on Si3N4 membrane

Akihito Matsushita1, Son Le Ngoc1, Takashi Tachiki1, Takashi Uchida1(NDA1)