The 60th JSAP Spring Meeting,2013

The 60th JSAP Spring Meeting,2013

Mar 27 - Mar 30, 2013Kanagawa Institute of Technology,Japan
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JSAP Spring / Autumn Meeting
The 60th JSAP Spring Meeting,2013

The 60th JSAP Spring Meeting,2013

Mar 27 - Mar 30, 2013Kanagawa Institute of Technology,Japan

[27p-B6-8]Study on Fabrication Process Conditions of Micro-Spring Arrays for LSI Interconnection

○Chinami Kaneshiro1, Kyota Kishimoto1(Okinawa NCT1)
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