[17a-A8-1]High-rate homoepitaxial growth of diamond (100) films by MPCVD using spherical cavity
○Shunsuke Watanabe1, Ryusuke Morimoto1, Daiki Kaneta1, Norio Tokuda1,2,3, Hiromitsu Kato2,3, Hitoshi Umezawa2,3, Satoshi Yamasaki2,3, Osamu Ariyada4, Takao Inokuma1(Grad. School of Natural Sci. & Tech. Kanazawa Univ.1, AIST2, JST,CREST3, Arios Inc4)
