The 61st JSAP Spring Meeting, 2014

The 61st JSAP Spring Meeting, 2014

Mar 17 - Mar 20, 2014Sagamihara Campus, Aoyama Gakuin University, Japan
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JSAP Spring / Autumn Meeting
The 61st JSAP Spring Meeting, 2014

The 61st JSAP Spring Meeting, 2014

Mar 17 - Mar 20, 2014Sagamihara Campus, Aoyama Gakuin University, Japan

[17a-D6-2]Oxygen analysis of amorphous carbon films with benzene by PECVD

○Xiaolong Zhou1, Keiji Komatsu1, Ikumi Toda1, Shigeo Ohshio1, Hiroyuki Muramatsu1, Haruhiko Ito1, Hidetoshi Saitoh1(Nagaoka Univ. Tech.1)
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