The 61st JSAP Spring Meeting, 2014
Mar 17 - Mar 20, 2014Sagamihara Campus, Aoyama Gakuin University, Japan
The 61st JSAP Spring Meeting, 2014
Mar 17 - Mar 20, 2014Sagamihara Campus, Aoyama Gakuin University, Japan
[17a-D6-3]Structural change of hydrogenated amorphous carbon films using rf plasma CVD with application of pulsed bias voltage
○Xiaolong Zhou1, Keiji Komatsu1, Ikumi Toda1, Shigeo Ohshio1, Hiroyuki Muratsu1, Haruhiko Ito1, Hidetoshi Saitoh1(Nagaoka Nniv. Tech.1)
