[17a-D6-4]Quantification of hydrogen in DLC with glow discharge optical emission spectroscopy
○Hikari Takahara1,2, Ryoya Ishigami3, Kenji Kodama1, Atsushi Kojyo1, Keisuke Yasuda3, Tatsuya Nakamura2, Yoshihiro Oka2(Rigaku. Corp.1, University of Hyogo2, WERC3)
