The 61st JSAP Spring Meeting, 2014
Mar 17 - Mar 20, 2014Sagamihara Campus, Aoyama Gakuin University, Japan
The 61st JSAP Spring Meeting, 2014
Mar 17 - Mar 20, 2014Sagamihara Campus, Aoyama Gakuin University, Japan
[17a-D6-6]Alkali resistance of hydrogenated amorphous carbon films synthesized by electron cyclotron resonance-chemical vapor deposition method
Yasushi Sasaki1, ○Yasuyuki Nakaya1, Shigeo Ohshio1, Keiji Komatsu1, Ikumi Toda1, Hiroyuki Muramatsu1, Hidetoshi Saitoh1(Nagaoka Univ.Tech.1)
