[17a-D6-9]The change of refractive index and extinction coefficient of hydrogenated DLC films by the soft X-ray irradiation
○Ryo Imai1, Kengo Kidena1, Akihiro Fujimoto2, Noriaki Toyoda2, Kazuhiro Kanda1(LASTI, Univ. of Hyogo1, Grad. School of eng., Univ. of Hyogo2)
