The 61st JSAP Spring Meeting, 2014

The 61st JSAP Spring Meeting, 2014

Mar 17 - Mar 20, 2014Sagamihara Campus, Aoyama Gakuin University, Japan
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JSAP Spring / Autumn Meeting
The 61st JSAP Spring Meeting, 2014

The 61st JSAP Spring Meeting, 2014

Mar 17 - Mar 20, 2014Sagamihara Campus, Aoyama Gakuin University, Japan

[17a-E10-2]Influence of Oxygen Partial Pressure Ratio on RF Sputtered ZnO Thin Films

○Dai Abe1, Tatsuya Mori2, Hiroshi Chiba2, Syuhei Okuda2, Tomoyuki Kawashima1,2, Katsuyoshi Washio1,2(Tohoku Univ1, Tohoku Univ2)
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