The 61st JSAP Spring Meeting, 2014

The 61st JSAP Spring Meeting, 2014

Mar 17 - Mar 20, 2014Sagamihara Campus, Aoyama Gakuin University, Japan
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JSAP Spring / Autumn Meeting
The 61st JSAP Spring Meeting, 2014

The 61st JSAP Spring Meeting, 2014

Mar 17 - Mar 20, 2014Sagamihara Campus, Aoyama Gakuin University, Japan

[17a-E10-4]Chemical Vapor Deposition of ZnO Films using Remote Plasma Generated near Atmospheric Pressure

○（D）Yukinori Nose1, Takuya Kiguchi1, Tatsuru Nakamura1, Takeshi Yoshimura1, Atsushi Ashida1, Tsuyoshi Uehara2, Norifumi Fujimura1(Osaka Prefecture Univ.1, SEKISUI CHEMICAL CO., LTD.2)
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