[17a-E10-6]Fabrication of a planer cavity using a single-crystalline ZnO as an active layer by the reactive helicon-wave-excited-plasma sputtering method
○Kentaro Furusawa1,2, Kento Kakihata1,2, Masafumi Koyama1,2, Shigefusa Chichibu1,2(Tohoku Univ.1, Tohoku Univ.2)
