The 76th JSAP Autumn Meeting, 2015
Sep 13 - Sep 16, 2015Nagoya Congress Center
The 76th JSAP Autumn Meeting, 2015
Sep 13 - Sep 16, 2015Nagoya Congress Center
[15a-PA1-3]Mask-less Exposure Equipment for Education by Using a Commercially Available DLP Projector
〇Takenari Baba1, Yukihiro Kudoh2, Taiju Takahashi2(1.Kogakuin Univ. Grad. School of Eng., 2.Kogakuin Univ.)
Keywords:
Mask-less Exposure,DLP Projector
本研究では、DLPプロジェクターを用いて安価で教育用途でも使いやすいマスクレス露光装置を提案する。