The 76th JSAP Autumn Meeting, 2015

The 76th JSAP Autumn Meeting, 2015

Sep 13 - Sep 16, 2015Nagoya Congress Center
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JSAP Spring / Autumn Meeting
The 76th JSAP Autumn Meeting, 2015

The 76th JSAP Autumn Meeting, 2015

Sep 13 - Sep 16, 2015Nagoya Congress Center

[15p-PA2-1]ta-C film damage of deep ultraviolet irradiation in Oxygen atmosphere

〇TOMOMI KOZU1,3, MAKOTO YAMAGUCHI2, MASAHIRO KAWAGUCHI4, KEN NISHIDA3(1.Renishaw KK, 2.Akita Univ., 3.NDA, 4.TIRI)
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Keywords:

deep ultraviolet,Raman spectroscopy,amorphous carbon

Deep ultraviolet (DUV) excited Raman spectroscopy is useful for ta-C (Tetrahedral Amorphous Carbon) film evaluation because it can observe sp3 bond directly. But then the ta-C film has damage due to irradiation of DUV light. In this presentation, we show the DUV irradiation damage of ta-C in Oxygen atmosphere.
　　　
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