The 76th JSAP Autumn Meeting, 2015

The 76th JSAP Autumn Meeting, 2015

Sep 13 - Sep 16, 2015Nagoya Congress Center
JSAP Spring / Autumn Meeting
The 76th JSAP Autumn Meeting, 2015

The 76th JSAP Autumn Meeting, 2015

Sep 13 - Sep 16, 2015Nagoya Congress Center

[16a-2K-4]Evaluation of antenna-coupled bolometer detector fabricated on Si3N4/SiO2 membrane

〇Takashi Uchida1, Akihito Matsushita1, Takashi Tachiki1(1.National Defense Academy)

Keywords:

microbolometer,antena-coupled device,membrane