The 62nd JSAP Spring Meeting, 2015

The 62nd JSAP Spring Meeting, 2015

Mar 11 - Mar 14, 2015Shonan Campus, Tokai University
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JSAP Spring / Autumn Meeting
The 62nd JSAP Spring Meeting, 2015

The 62nd JSAP Spring Meeting, 2015

Mar 11 - Mar 14, 2015Shonan Campus, Tokai University

[11a-A11-7]Influence of ripple formation to submicron machining by a femto-second laser on Si surface

〇Takashi Yagi1, Ryo Sugawara1, Yuki Sone1, Shota Sekiguchi1, Shin Kadoi1, Ryusei Hayashi1(1.Tokai Univ.)
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Keywords:

Si,ripple

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