The 77th JSAP Autumn Meeting, 2016

The 77th JSAP Autumn Meeting, 2016

Sep 13 - Sep 16, 2016TOKI MESSE
JSAP Spring / Autumn Meeting
The 77th JSAP Autumn Meeting, 2016

The 77th JSAP Autumn Meeting, 2016

Sep 13 - Sep 16, 2016TOKI MESSE

[14a-D63-4]Evaluation of Characteristics in VOx Thin-Films Obtained by Reduced-Pressure Firing of Precursor Films on Si3N4/SiO2/Si Substrates Fabricated by MOD

〇Kohei Maeda1, Takashi Tachiki1, Takashi Uchida1(1.National Defense Academy)

Keywords:

MOD,VOx thin films,bolometer