[14a-D63-4]Evaluation of Characteristics in VOx Thin-Films Obtained by Reduced-Pressure Firing of Precursor Films on Si3N4/SiO2/Si Substrates Fabricated by MOD
〇Kohei Maeda1, Takashi Tachiki1, Takashi Uchida1(1.National Defense Academy)
Keywords:
MOD,VOx thin films,bolometer
