The 77th JSAP Autumn Meeting, 2016

The 77th JSAP Autumn Meeting, 2016

Sep 13 - Sep 16, 2016TOKI MESSE
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JSAP Spring / Autumn Meeting
The 77th JSAP Autumn Meeting, 2016

The 77th JSAP Autumn Meeting, 2016

Sep 13 - Sep 16, 2016TOKI MESSE

[14p-P11-3]AFM observaton of DUV irradiation damage on ta-C film

〇TOMOMI KOZU1,3, Yamaguchi Makoto1, Kawaguchi Masahiro2, Yoshimura Masamichi4(1.Akita Univ, 2.TIRI, 3.InoCo co., 4.TTI)
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Keywords:

diamond like carbon,deep ultraviolet,Raman spectroscopy

Tetrahedral amorphous Carbon (ta-C) is kind of amorphuos carbo which is include sp3 bond and Hydrogen free. For evaluation of ta-C, deep ultraviolete DUV) Raman spectroscopy is usefull but irradiation of DUV makes damage on ta-C film. We have investigated DUV irradiation damege on ta-C film. This time we observe the damage by using atomic force microscope.
　
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