The 65h JSAP Spring Meeting, 2018

The 65h JSAP Spring Meeting, 2018

Mar 17 - Mar 20, 2018Nishi-waseda Campus, Waseda University / bell salle Takadanobaba
JSAP Spring / Autumn Meeting
The 65h JSAP Spring Meeting, 2018

The 65h JSAP Spring Meeting, 2018

Mar 17 - Mar 20, 2018Nishi-waseda Campus, Waseda University / bell salle Takadanobaba

[17p-P1-7]Surface roughness dependency of optical properties of textured SiC thin films

〇Yuki Kawamura1, Yuzuru Narita1, Atsushi Saito1, Kensuke Nakajima1, Maki Suemitsu2(1.Yamagata Univ., 2.RIEC,Tohoku Univ.)

Keywords:

silicon carbide,Surface roughness,optical property