[17p-P1-7]Surface roughness dependency of optical properties of textured SiC thin films
〇Yuki Kawamura1, Yuzuru Narita1, Atsushi Saito1, Kensuke Nakajima1, Maki Suemitsu2(1.Yamagata Univ., 2.RIEC,Tohoku Univ.)
Keywords:
silicon carbide,Surface roughness,optical property
