[18a-PA2-4]Investigation of Fabrication Conditions for VO2 films by MOD using Carbon Thermal Reduction
〇Yuhi Fujishiro1, Masami Kawahara2, Tsuyoshi Samura2, Takashi Tachiki1, Takashi Uchida1(1.NDA, 2.Kojundo Chemical Lab.)
Keywords:
metal-organic decomposition,VO2,carbon thermal reduction
