The 68th JSAP Spring Meeting 2021

The 68th JSAP Spring Meeting 2021

Mar 16 - Mar 19, 2021Online Virtual Meeting
JSAP Spring / Autumn Meeting
The 68th JSAP Spring Meeting 2021

The 68th JSAP Spring Meeting 2021

Mar 16 - Mar 19, 2021Online Virtual Meeting

[16a-P04-3]Characteristics evaluation of V0.75Ti0.25O2 microbolometer fabricated by MOD

〇Yuhi Fujishiro1, Masami Kawahara2, Tsuyoshi Samura2, Takashi Tachiki1, Takashi Uchida1(1.National Defense Academy, 2.Kojundo Chemical Lab.)

Keywords:

metal organic decompsition,V0.75Ti0.25O2 thin films,bolometer