[16a-P04-3]Characteristics evaluation of V0.75Ti0.25O2 microbolometer fabricated by MOD
〇Yuhi Fujishiro1, Masami Kawahara2, Tsuyoshi Samura2, Takashi Tachiki1, Takashi Uchida1(1.National Defense Academy, 2.Kojundo Chemical Lab.)
Keywords:
metal organic decompsition,V0.75Ti0.25O2 thin films,bolometer
