The 83rd JSAP Autumn Meeting 2022

The 83rd JSAP Autumn Meeting 2022

Sep 20 - Oct 17, 2022Kawauchi-Kita Campus, Tohoku University
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JSAP Spring / Autumn Meeting
The 83rd JSAP Autumn Meeting 2022

The 83rd JSAP Autumn Meeting 2022

Sep 20 - Oct 17, 2022Kawauchi-Kita Campus, Tohoku University

[20a-P01-1]Fundamental Study on Ultra-High Frequency Dual-Channel Wireless QCM Fabrication Using Si Anisotropic Etching

〇Junki Shinohara1, Manabu Yoshino1, Fumihito Kato1(1.Nippon Inst.of Tech.)
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Keywords:

Quartz crystal microbalance,Ultra-high frequency,Dual-channel

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