The 69th JSAP Spring Meeting 2022
Mar 22 - Apr 18, 2022Sagamihara Campus, Aoyama Gakuin University & Online
The 69th JSAP Spring Meeting 2022
Mar 22 - Apr 18, 2022Sagamihara Campus, Aoyama Gakuin University & Online
[24p-D316-1][The 22nd JSAP Outstanding Achievement Award Speech] Contribution to Development of MEMS Technology and Its Industrialization
〇Masayoshi Esashi1(1.Tohoku Univ.)
Keywords:
MEMS,sensor,microsystem
The technology called MEMS (Micro Electro Mechanical Systems) and Microsystems combines various technologies to semiconductor microfabrication for integrated circuits. These have been used as key components of systems as sensors. I have been involved in the MEMS for half a century. Packaging, integration with LSI and industrialization will be presented.