[21a-P03-1~16] 6.4 Thin films and New materials

[21a-P03-15] Influence of Chemical Composition on Electrical Characterization for Pb(Zr_0.52, Ti_0.48)O₃ Thin Films Deposited on Flexible Printed Circuit

〇Naoki Nishikawa¹, Norimitsu Hirosaki², Hiroaki Nishikawa³ (1.Grad. Sch. B.O.S.T., Kindai Univ, 2.Taiyo Industrial Co., LTD, 3.B.O.S.T., Kindai Univ)

Keywords:

lead zirconate titanate,epitaxial thin film,transfer prosess