[1-33A]Coupled Simulation of Monte Carlo and Finite Element Method of Film Constrained on Substrates
*Shuji Matsumoto1, Masayoshi Simizu2, Hidehiko Aoki3, Hideaki Matsubara4(1. Murata Manufacturing Co., Ltd., 2. Midorinosozai Laboratory, 3. ASIM, 4. Tohoku University)
Keywords:
Sintering,Monte Carlo Method,Finite Element Method,Constrained Sintering,Coupled Simulation
