Spring Meeting of the Japan Society of Powder and Powder Metallurgy, 2018
May 14 - May 16, 2018Kyoto University Clock Tower Centennial Hall
Spring Meeting of the Japan Society of Powder and Powder Metallurgy, 2018
May 14 - May 16, 2018Kyoto University Clock Tower Centennial Hall
[2-25]Invited Talk: Development of damage-free figuring and finishing techniques for ceramics materials by utilizing reactive plasma
*Kazuya Yamamura1(1. Osaka University, Graduate School of Engineering)
Keywords:
Functional ceramics,Reactive plasma,Single crystal silicon carbide,Single crystal gallium nitride,Reaction sintered silicon cabide,Plasma CVM,Plasma assisted polishing