[2-13]Invited Talk : Development of sensor devices using piezoelectric vibration in low frequency ultrasonic band
*KATSUMI FUJIMOTO1, KOSUKE SHIRATSUYU1, HIRONARI YAMAMOTO1, AKIHIRO MITANI1(1. Murata Manifacturing Co.,Ltd.)
Keywords:
Piezoelectric gyroscope,ultrasonic transducer,flexure vibration
