[2-14A]High sensitivity smell sensor by using piezoelectric thin film device
*Yosuke Onda1, Masashi Hattori1, Yoshiki Iwazaki1, Kenichi Shimomai1, Toru Fujii1, Hiroshi Kishi1(1. TAIYO YUDEN CO., LTD.)
Keywords:
Smell sensor,Piezoelectric thin film device,Resonator
