Autumn Meeting of the Japan Society of Powder and Powder Metallurgy, 2019
Oct 22 - Oct 24, 2019Toyoda Auditorium of Nagoya University
Autumn Meeting of the Japan Society of Powder and Powder Metallurgy, 2019
Oct 22 - Oct 24, 2019Toyoda Auditorium of Nagoya University
[2-17A]Control of O-polar and Zn-plolar ZnO film growth and application to polarity inversion multilayer piezoelectric devices
*Tsuyoshi Majima1,3, Takahiko Yanagitani1,2,3(1. Waseda University, 2. JST PRESTO, 3. ZAIKEN)
Keywords:
ZnO piezoelectric thin films,Polarity inverted multilayer,Ultrasonic transducer