Autumn Meeting of the Japan Society of Powder and Powder Metallurgy, 2019
Oct 22 - Oct 24, 2019Toyoda Auditorium of Nagoya University
Autumn Meeting of the Japan Society of Powder and Powder Metallurgy, 2019
Oct 22 - Oct 24, 2019Toyoda Auditorium of Nagoya University
[2-18A]Crystal structure analysis of giant piezoelectric ScAlN by thick film growth and pulverization
*Ningrui Bai1,2, Takahiko YANAGITANI1,2,3(1. Waseda University, 2. ZAIKEN, 3. JST PRESTO)
Keywords:
ScAlN powder,lattice constant