[2-23B]Optimization method of thin film deposition conditions using machine learning
*Yusaku Nakamura1, Takaki Hamamoto1, Hiroki Nakagawa1, Kuniaki Tanaka1, Shinji Taniguchi1, Kenichi Shimomai1, Yoshiki Iwazaki1(1. TAIYO YUDEN CO., LTD.)
Keywords:
Machine learning,Thin film,Deposition,SiOF,Temperature compensated film
