Autumn Meeting of the Japan Society of Powder and Powder Metallurgy, 2023

Autumn Meeting of the Japan Society of Powder and Powder Metallurgy, 2023

Oct 19 - Oct 20, 2023同志社大学 寒梅館
Meeting of Japan Society of Powder and Powder Metallurgy
Autumn Meeting of the Japan Society of Powder and Powder Metallurgy, 2023

Autumn Meeting of the Japan Society of Powder and Powder Metallurgy, 2023

Oct 19 - Oct 20, 2023同志社大学 寒梅館

[2-23B]Optimization method of thin film deposition conditions using machine learning

*Yusaku Nakamura1, Takaki Hamamoto1, Hiroki Nakagawa1, Kuniaki Tanaka1, Shinji Taniguchi1, Kenichi Shimomai1, Yoshiki Iwazaki1(1. TAIYO YUDEN CO., LTD.)

Keywords:

Machine learning,Thin film,Deposition,SiOF,Temperature compensated film