[P-A1-01]TiN and AlN reaction synthesis: laser control and modeling
*Igor Shishkovsky1(1. P.N. Lebedev Physics Institute of Russian Academy of Sciences, Samara branch(Russia))
Keywords:
selective area laser deposition vapor infiltration (SALDVI),self-propagated high-temperature synthesis (SHS),aluminum nitride (AlN),titanium nitride (TiN)
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